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Reliability of RF-MEMS Switch

Micro-Electro-Mechanical-Systems (MEMS) is a technology emerged from
the unison of electronics and mechanical technologies. MEMS switches offer many
advantages like lower power consumption, high linearity, higher integration . In spite of these advantages commercialization of MEMS devices is hindered by various reliability issues.

The dominating failure mechanism in these switches is stiction. The stiction
problem results from the dielectric charging phenomenon. In this paper dielectric
charging of switch is studied and characterized to suggest measures to reduce stiction.


Objective  is to design a switch considering all these aspects to ensure
improvement in performance, production and yield of MEMS switch.



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Tue, 12/04/2011 - 07:37

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